Bringing together contributions from leading experts in the field, this book reviews laser processing concepts that allow the structuring of material beyond optical limits, and methods that facilitate direct observation of the underlying mechanisms by exploring direct structuring and self-organization phenomena. The capacity to nanostructure material using ultrafast lasers lays the groundwork for the next generation of flexible and precise material processing tools. Rapid access to scales of 100 nm and below in two and three dimensions becomes a factor of paramount importance to engineer materials and to design innovative functions. To reflect the dynamic nature of the field at all levels from basic science to applications, the book is divided into three parts, Fundamental Processes, Concepts of Nanostructuring, and Applications, each of which is comprehensively covered. This book will be a useful resource for graduate students and researchers in laser processing, materials engineering, and nanoscience.