This book explores new principles and methods of nanomanufacturing based on physical/chemical effects through interdisciplinary research and reveals surface/interface effects and scale effects in processing, forming, modification, and cross-scale manufacturing at nanoscale and nanoscale precision. It is a summary of a major research project in the field of engineering and materials science of China, the "Fundamental Research of Nanomanufacturing". It clarifies the evolution mechanism of material structure, establishes the accurate characterization and measurement method of nanomanufacturing process, develops some original nanomanufacturing processes and equipment, and provides theoretical basis for realizing the consistent batch process of nanomanufacturing. It reports a series of research breakthroughs in principles and methods of nano-precision manufacturing, nanoscale structure fabrication as well as efficient and multiscale fabrication of large area nanostructures.